2008 International Symposium on Micro/Nano System Technology

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2008 International Symposium

on Micro/Nano System Technology

(Co-organized by Ritsumeikan University, Shanghai Jiao Tong University
and Hanoi University of Technology)

SCIENTIFIC PROGRAM

18 DECEMBER, 2008

8:00 to 11:00	Registration, C2 Conf. Hall HUT
8:30-8:40	Opening session Chair: Prof. Than Duc Hien (Former Director of International Training Institute for Materials Science (ITIMS), HUT)
8:40-8:50	Prof. Ha Duyen Tu (Vice Rector of Hanoi University of Technology (HUT))
8:50-9:00	Prof. Susumu Sugiyama (Director of Research Institute for Nanomachine System Technology (RINST), Rits)
	Session MEMS/NEMS Technology and Commercialization Chair: Prof. Vu Ngoc Hung
9:00-9:25	COMMERCIALIZATION OF MEMS and NANO FABRICATION Ryutaro MAEDA, Toshihiro ITOH, Masaharu TAKAHASHI and Toshio SANO Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, Japan; Chiba University of Technology, Japan
9:25-9:50	SILICON MECHANICAL SENSORS AND ACTUATORS BASED ON MEMS TECHNOLOGY AND APPLICATIONS Dzung Viet Dao and Susumu Sugiyama Micro Nano Integrated Devices Lab., Ritsumeikan University, JAPAN
9:50-10:15	MEMS TECHNOLOGY IN OMRON Tomonori Seki OMRON Corporation, Japan
10:15-10:25	Coffee Break
	Session MEMS/NEMS Fabrication and Devices Chair: Prof. Li Yigui
10:25-10:45	MICRO MACHINING – A TOOL-BASED INTEGRATED APPROACH M. Rahman, A.B.M.A. Asad, Takeshi Masaki, T. Saleh, Y.S. Wong, H.S. Lim Mechanical Engineering Department, National University of Singapore, Singapore Masaki Giken, Osaka, Japan
10:45-11:05	QUANTITATIVE ANALYSIS OF THE INFLUENCE OF TURN RADIUS VARIATION OVER THE PERFORMANCE OF MAGNETIC MEMS ACTUATOR COMPOSED OF MULTI-TURN DRIVING COIL Xuhan Dai, Xiaolin Zhao, Guifu Ding, Bingchu Cai Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabricaton Technology, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, China, xlzhao@sjtu.edu.cn
11:05-11:25	A STUDY ON MICRO-GRASS PHENOMENON AND ETCH RATE IN DEEP REACTIVE ION ETCHING OF SILICON Hung Ngoc Vu, Minh Van Nguyen, Minh Van Le, Thong Quang Trinh International training institute for material science (ITIMS) Institute of engineering physics (IEP), Hanoi university of technology (HUT)
11:25-11:45	POLYMER MEMS BASED ON HOT EMBOSSING TECHNOLOGY Dzung Viet Dao1, Satoshi Amaya2, and Susumu Sugiyama1 1Ritsumeikan University, Shiga, JAPAN; 2TOWA Corporation, Kyoto, JAPAN
12:00-13:30	Lunch
	Session SENSORS AND ACTUATORS Chair: Dr. Dzung Viet Dao
13:30-13:50	DESIGN AND SIMULATION OF AN ELECTROTHERMAL ACTUATOR FOR A BISTABLE RELAY Y.B. Wu, C.C. Zhang∗, X.B. Zhang, G.F. Ding National Key Lab of Nano/Micro Fabrication Technology, Key Lab for Thin Film and Micro fabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, China
13:50-14:10	FIRST-PRINCIPLES SIMULATION ON PIEZORESISTIVE PROPERTIES IN LOW-DIMENSIONAL SILICON MATERIALS Koichi Nakamura, Toshiyuki Toriyam and Susumu Sugiyama Ritsumeikan University, Shiga, JAPAN
14:10-14:30	FABRICATION SAW ACTUATOR USING ELECTROPLATING AND ETCHING METHODS Li Yigui Institute of Micro/nano Science and Technology, Shanghai Jiaotong University, 800, Dong Chuang, Road, Shanghai, China, ygli@sjtu.edu.cn
14:30-14:50	A HIGH-G METAL CAPACITIVE MICROACCELEROMETER WITH SELF-CALIBRATION AND SELF-TEST FUNCTIONS Cui Feng, Chen Wenyuan, Zhang Weiping, Li Kai Research Institute of Micro/Nano Science & Technology, Shanghai Jiao Tong University, Shanghai, 200240, P. R. China, sdcuifeng@sjtu.edu.cn
14:50-15:10	IMPROVEMENTS IN THE DESIGN OF THE MULTI-AXIS PIEZORESISTIVE ACCELEROMETER Tan T.D, Dzung D.V, Long N.T, Thuy N.P, Sugiyama. S MEMS and Microsystems Department, College of Technology, VNUH, VIETNAM. International Training Institute for Materials Science (ITIMS), HUT, VIETNAM. Research Organization for Science and Engineering, Ritsumeikan University, Shiga, JAPAN, tantd@vnu.edu.vn
15:10-15:40	POSTER SESSION (served with Tea/Coffee)
P1	NOISE CONSIDERATIONS FOR A LOW-COST MEMS-BASED INERTIAL SENSOR UNIT Tan T.D, Ha L.M, Long N.T, Nam N.M, Thuy N.P MEMS and Microsystems Department, College of Technology, VNUH, VIETNAM. International Training Institute for Materials Science (ITIMS), HUT, VIETNAM. tantd@vnu.edu.vn
P2	DEVELOPMENT OF A PUNCH VEST USING SILICON PIEZORESISTIVE PRESSURE SENSOR FOR MARTIAL ARTISTS TRAINING Pham Hong Duong, Le Anh Tu and Duong Nghiep Chi Institute of Materials Science, Vietnamese Academy of Science and Technology, 18 Hoang Quoc Viet, Hanoi, Vietnam, duongphamhong@yahoo.com Institute of Sports Science, 141 Nguyen Thai Hoc Hanoi, Vietnam
P3	A STUDY ON AXIAL GAP SELF BEARING MOTOR DRIVES Nguyen Quang Dich, Ueno Satoshia Dept. of Mechanical Engineering, Ritsumeikan University. 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577, Japan, E-mail: gr046070@se.ritsumei.ac.jp
P4	SOME MEASURING OR CONTROLLING CAPABILITIES USING COMMERCIAL TYPE-SPIN VALVE MAGNETIC SENSORS Nguyen Anh Tuan and Ngo Quy Tai International Training Institute for Materials Science (ITIMS), Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Viet Nam.
P5	SIMPLE SYNTHESIS AND AMMONIC SENSING PROPERTIES AT LOW TEMPERATION OF TIN OXIDE NANOWIRES Le Thi Ngoc Loan and Nguyen Van Hieu Experimental and Practical Center, Quy Nhon University No. 170 An Duong Vuong Street, Quy Nhon City, Vietnam International Training Institute for Materials Science, Hanoi University of Technology, No.1 Dai Co Viet, Hanoi, Vietnam, E-mail: hieu@itims.edu.vn
P6	A POSSIBILITY FOR SINGLE SPIN ELECTRON DEVICES (SSEDs) Nguyen Anh Tuan International Training Institute for Materials Science (ITIMS), Hanoi University of Technology 1 Dai Co Viet Road, Hanoi, Viet Nam. E-mail: tuanna@itims.edu.vn; tuanna-itims@mail.hut.edu.vn
	Session MATERIALS SYNTHESIS, EVALUATION AND APPLICATIONS (I) Chair: Dr. Nguyen Phuc Duong
15:40-16:00	NOVEL GAS SENSORS BASED ON NANO-STRUCTURED MATERIALS Nguyen Van Hieu and Le Thi Ngoc Loan International Training Institute for Materials Science, Hanoi University of Technology, Vietnam; Experimental and Practical Center, Quy Nhon University, Vietnam
16:00 – 16:20	INVESTIGATION OF DNA IMMOBILIZATION METHODS ON SURFACE OF CONDUCTOMETRIC SENSOR, APPLIED FOR INFLUENZA (TYPE A) VIRUS DETECTION Phuong Dinh Tam, Ta Thi Nhat Anh, Chu Van Tuan, Mai Anh Tuan Hanoi Advanced School of Science and Technology (HAST) International Training Institute for Materials Science (ITIMS) Hanoi University of Technology, Vietnam Hung Yen University of Technology and Education Email: tampd-hast@mail.hut.edu.vn
16:20 – 16:40	PREPARATION, MAGNETIC PROPERTIES AND MARTENSITE TRANSFORMATION OF Ni2MnGa1-xAlx HEUSLER ALLOYS Nguyen Phuc Duong, Le Thanh Hung, Tran Dinh Nghiem, Than Duc Hien International Training Institute for Materials Science (ITIMS), Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Viet Nam, duong@itims.edu.vn
16:40 – 17:00	EFFECT OF SUBSTRATE TEMPERATURES ON THE PROPERTIES OF Bi -2223 THIN FILMS N. T. Mua , T. D. Hien , N. K. Man, C. N.R.Rao, A . Sundaresan International Training Institute for Materials Science (ITIMS), Hanoi University of Technology, Vietnam, nguyenthimua@yahoo.com Jawarhalal Nehru Centre for Advanced Scientific Research ( JNCASR), Bangalore-560 064, India
18:30-20:30	Reception by HUT
19 DECEMBER, 2008
8:30 – 11:00	Registration
	Session MECHATRONIC AND BIO-OPTIC SYSTEMS Chair: Prof. Vu Ngoc Hung
9:00-9:25	LOCOMATION VIA DEFORMATION Shinichi Hirai, Department of Robotics, Ritsumeikan University, JAPAN
9:25-9:45	NONLINEAR ROTATIONAL SPRING AND TENSION CONTROL FOR STABILIZING ELECTROSTATICALLY DRIVEN MICROMIRROR Minoru Sasaki, Shinya Kumagai, Toyota Technological Institute, Hisakata 2-12-1, Tenpaku-ku, Nagoya 468-8511, Japan, mnr-sasaki@toyota-ti.ac.jp
9:45-10:05	DEVELOPMENT AND APPLICATION OF TOTAL INTERNAL REFLECTION (TIR)-BASED CHIP BASED ON MEMS TECHNOLOGY Ryuji Yokokawa, Nam Cao Hoai Le, Thien Duy Nguyen, Dzung Viet Dao, John Wells and Susumu Sugiyama, Ritsumeikan University, JAPAN, ryuji@se.ritsumei.ac.jp, PRESTO/CREST, Japan Science and Technology (JST), JAPAN
10:05-10:15	Coffee Break
	Session MATERIALS SYNTHESIS, EVALUATION AND APPLICATIONS (II) Chair: Dr. Nguyen Van Hieu
10:15-10:35	ZnO NANOPARTICLES WITH NEARLY SPHERICAL MORPHOLOGY: SYNTHESIS AND PHOTOLUMINESCENCE Pham Van Tuan, Nguyen Thanh Huy, Tran Ngoc Khiem, Pham Thanh Huy Hanoi Advanced School of Science and Technology (HAST), Hanoi University of Technology International Training Institute for Materials Science (ITIMS), Hanoi University of Technology
10:35 – 10:55	INFLUENCE OF TECHNOLOGY ON MAGNETIC AND STRUCTURE OF ULTRAFINE PARTICLES SrFe12O19 Tran Thi Viet Nga, Nguyen Thai Ha, Than Duc Hien and Nguyen Phuc Duong aInternational Training Institute for Materials Science (ITIMS), Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Viet Nam, vietnga@itims.edu.vn
10:55 – 11:15	SYNTHESIS AND MAGNETIC PROPERTIES OF IRON OXIDES PREPARED BY CO-PRECIPITATION WITH DIFFERENT MOLAR RATIOS OF Fe3+: Fe2+ Dao Thi Thuy Nguyet, Lu Ha Anh, Nguyen Thi Lan, Nguyen Phuc Duong, Than Duc Hien International Training Institute for Materials Science (ITIMS), Hanoi University of Technology, Viet Nam, nguyet@itims.edu.vn
11:15-11:35	MECHANICAL CHARACTERIZATION OF SMALL MATERIAL STRUCTURES BASED ON DEPTH-SENSING INDENTATION Minh-Quy Le Department of Mechanics of Materials & Structures, Faculty of Mechanical Engineering, Hanoi University of Technology, Vietnam, quylm@mail.hut.edu.vn
11:35-12:00	CLOSING SESSION
	Prof. Xiaolin Zhao (Director of Institute for Micro/Nano Science and Technology, Shanghai Jiao Tong University (SJTU))
	Prof. Vu Ngoc Hung (Director of ITIMS, HUT)
12:00 - 13:30	Luncheon
14:00-18:00	Hanoi Industrial Tour
18:30-20:30	Dinner party
	20 - 21 December: Cooperative Promotion and Industrial Tour in Halong bay - Catba island - Haiphong Industrial Zone: departure time, Hotel name???